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To explore new physics phenomena of low dimensional materials
with a special emphasis on two-dimensional layered structures
| No | Name | Model | Location | Superuser | Contacts |
|---|---|---|---|---|---|
| 1 | ALD | Lucida D100 | 86391 | Byeonghoon Lee | 010-9075-5107 |
| 2 | ALD(Clean room) | Lucida D100 | 86698 | Byeonghoon Lee | 010-9075-5107 |
| 3 | Co-evaporator system | Customized | 86698 | Moonyoung Jung | 010-5669-8370 |
| 4 | Co-sputtering system | Customized | 86391 | Moonyoung Jung | 010-5669-8370 |
| 5 | Dry transfer system | Customized | 86691 | Le Thi Suong | 010-6532-2512 |
| 6 | Dry transfer system (Hot temp. probe sys.) | HOT-TEMP PROBE-SYSTEM | 86691 | Debottam Daw | 010-2376-9558 |
| 7 | Ebeam and thermal evaporator system | Customized | 86391 | Lee, Sung-gyu | 010-7666-6655 |
| 8 | Ebeam and thermal evaporator system-2 | Customized | 86391 | Hojoon Yi | |
| 9 | Ebeam lithography | Customized | 86698 | Tuan Dung | 010-9486-2804 |
| 10 | Ebeam lithography Ⅱ | JSM-IT200 | 86698 | Minjeong Kim | 010-5561-2463 |
| 11 | Pattern generator | Heidelberg Pattern Generator (upg-101) | 86698(yellow room) | Hosub Lim | 010-9466-1672 |
| 12 | Plasma Enhaced Atomic Layer Deposition (PEALD) | PEALD-150s | 86391 | Byeonghoon Lee | 010-9075-5107 |
| 13 | Rapid Thermal Processing System (순간 열처리 시스템) | RTP-1300 | 86391 | Hyunyong Song | 010-9193-4035 |
| 14 | RIE(Reactive Ion Etching) System | AFS-4RT | 86698 | Wei Xu | 010-8289-8566 |
| 15 | Thermal evaporator | Customized | 86698 | Hyeonbeom Kim | 010-4670-5296 |
| 16 | Mask aligner | MA6 SUSS | 86698 | Ryu JungHyun | 010-3706-4726 |
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IBS Center for Integrated Nanostructure Physics , Office 86371, N Center (BIdg. 86)Sungkyunkwan University, 2066, Seobu-ro, Jangan-gu, Suwon-si, Gyeonggi-do
Copyright(c) 2014 Center for Integrated Nanostructure Physics at IBS. All Rights Reserved.
