Center for Relativistic Laser Science

1. Equipment name : E-beam evaporator (무라돈 환경 전자빔 증착 시스템)

2. Manufacture and Model

- Synwiz 2017

- Customized model

3. Purpose : This equipment is used to measurement for low temperature detectors. Deposition thin films for cryogenic crystal detectors and light detectors in a Radon free environment.

4. Specification and performance

(1) Process chamber

  - 3 level of UHV (cryo, turbo, rough pump)

  - large loading space : simultaneous deposition of 4 ~ 5 samples

                                  (individual sample of maximum 60 (D) × 90 (H) mm)

  - rotational (3-axes) sample holder including water cooling system

(2) source chamber

  - Dual E-beam gun

  - separated with process chamber by gate valve

(3) load-rock chamber and glove box

  - minimization of the surface contamination by Radon and moisture

- nitrogen charge type (less than 1 ppm of moisture content with dry trap)

5. Location and Picture :

- IBS head quarter, C169 clean room 1000 (deposition room)