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PLD system II

equipment explanation
Model Customized
Operating time SUN(00:00~24:00)
MON(00:00~24:00)
TUE(00:00~24:00)
WED(00:00~24:00)
THU(00:00~24:00)
FRI(00:00~24:00)
SAT(00:00~24:00)
Location 86391
inquiry None
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-
Reservation

Notice

 

Available Time // Except 9:00~13:00 on Mon~Fri.

 

Notice // If you want to have training for using this equipment, please contact Super-user.

 

Current Status // Now on operation.

Pulsed laser deposition system (KOVAC)


PLD with L/L chamber system
Halogen heater : max 800 ['C]
4 target holders
Manual control system
2 leak valves
Mini tranfer chamber was attached on L/L system.

 

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