Center for Relativistic Laser Science

1.Probe station main body unit   
-8\" ambient coaxial chuck_Low leakage current chuck (10-15)    
-Vacuum chuck : center hold, on&off switch    
-Z stage : fine motion, up&down : 10mm 
 -Theta Micro ontrol 15c
 -X,Y stage : travel 200x200mm, fine motion    
-Plate unit for 8 positioner set (max)   
-Available vacuum switch on,off at 6 port8) Microscope mount X,Y stage fine motion (50x50mm) 
 
2. CCD Camera Precision  System_Full HD   
-WBN21DS, 2.1M Pixel, 3o Fraim   
-22\" LCD Monitor Dual Port & Hanggler 

3.Vibration Table_Rack top   
-Dimenion : 900 x 900 x 800
 
4.Hot Chuck & Controller_Spot 100mm   
-Temp Range : ~ 300 degree (Max 400)   
-Temp Resolution : 1um   
-RTP Sensor & PID Control
 -USB Interface & Temp Sweep Sweep Included    
-Cemramic Pad    
-Cooling Pan On/off
  
5. Vacuum pump : low noise for lab
 
6. PSM 1000 고배율 현미경

※ 공동활용에 문제가 있으면, 장비심의관리위원장 또는 행정실로 연락주시기 바랍니다.