Center for Relativistic Laser Science

1) Main system vacuum pumping module
- High vacuum pump : cryo pump & compressure
- Pumping speed : 1,500 L/sec for N2
- Main isolation valve : Pneumatic Gatevalve
- Roughing pump : rotary vane pump
- Pumping speed : 550 L/mi

- Roughing line : Pneumatic right anglevalve & sus304tubing
- Vacuum line : Angle valve / Flexible hose /Vent valve / Clamp¢ering
- Exhaust line : Metal flexible tube
- High & low vacuum gauge sensor

2) Load lock module vacuum pumping module
- High vacuum pump : Turbo pump
- Pumping speed : 50 L/sec for N2
- Main isolation valve : Pneumatic Gatevalve
- Roughing pump : rotary vane pump
- Pumping speed : 150 L/min
- Roughing line : Pneumatic right anglevalve & sus304tubing
- Vacuum line : Angle valve / Flexible hose /Vent valve / Clamp¢ering
- Exhaust line : Metal flexible tube
- High & low vacuum gauge sensor

3) Process vacuum maintain controller
 - Model : TLP0151
 - High & low vacuum reading & pump control
 - Valve automatic Control
 - Film thickness parameter measure
 - Souce power control
 - Ethernet interface
 - Substrate control
 - Load lock module control

※ 공동활용에 문제가 있으면, 장비심의관리위원장 또는 행정실로 연락주시기 바랍니다.