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[85596호]스퍼터 건 어셈블리/Sputter gun assembly

equipment explanation
Model GENCOA SW50-I
Operating time 01:00 ~ 24:00
inquiry 김정균,lostspirits@naver.com
Reservation

1. Target size : 46mm OD x 3 mm thick
2. Backing plate: 50mm OD x 3 mm thick
3. Magnetic material Fe : 1.0mm thick ; Ni : 3mm thick
4. Erosion diameter SW: 46mm, PP: 40mm
5. Internally mounted on a 25.4OD 300mm long shaft
6. Includes diaphragm indirect cooling for High power operation
7. Quick target change
8. Shaft length modification to length 500mm
9. Gas Injection Option 2\\\\\\\" Circular Magnetron. Atmospheric side connection
10. Shutter option for 2\\\\\\\" circular magnetron source. Includes sliding flexible shaft and shutter shaft feedthrough with pneumatic actuator (no solenoid value included)
11. Supplement for tiliting head option. ±30 Degree adjustable at vacuum side
12. Supplement for high power RF option for SW100 circular magnetron.Includes RF cage with a copper strip to direct connection for matching box (matching box mounting interface is not included) or connection to C-ES25 electrical shield box.
13. Wall mount feedthrough for 25.5mm OD internal shaft mount circular magnetron

 

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