| Model | CTI onboard cryopump |
|---|---|
| Operating time | 01:00 ~ 24:00 |
| inquiry |
김정균.lostspirits@navercom |
1. Rough Pump connection : NW 25 ISO KF
2. Purge Gas Connection : VCR-4 Female Nut
3. Integrated HardwareRoughing, Valve Purge Valve, Cryopump TC gauge, 1st stage diode, 2nd stage diode, 1st stage heater, 2nd stage heater, 2 set point relays, RS-232 Interface
4. Pumping Speeds : Water = 2500liters/sec, Air 800 = liters/sec, Hydrogen = 1200 liters/sec, Argon = 650 liters/sec
5. Argon Throughput : 700 sccm (9 Torr-liters/sec)
6. Capacity:Argon = 500 std. litersHydrogen = 9 std. liters @ 5 x 10-6 Torr
7. Crossover : 100 Torr-liters
8. Regeneration timeFull (Typical) Less than 162 minutesFast (Typical) Less than 60 minutes
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