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[83179호]스퍼터 시스템/Sputter Gun and Controller Set

equipment explanation
Model IG2
Operating time 01:00 ~ 24:00
inquiry 박상우
Reservation

Source Type : Hot filament electron impact (dual filament, backfilltype)

Beam Energy ≤ 2 keV in 500 eV increments

Beam Diameter
at 25 mm working distance 2.5 mm FWHM
at 50 mm working distance 3.5 mm FWHM

Maximum Total Target Current
10 μA at V = 2 kV
Current Density
at 25 mm working distance
200 μA/cm2 when VB=2 kV, Emission Current = 30 mA

at 50 mm working distance
100 μA/cm2 when VB=2 kV, Emission Current = 30 mA
Mounting Standard 70 mm (2.75\\\") CF bored flange OD,
approx. 34.3 mm (1.35\\\") ID minimum tube required

Flange to End-of-Optics 7.00\\\" or 9.25\\\", 2.25\\\" less with optional X-Y Aligner
(RBD P/N IG2-EA)

Working Distance Typically 25-50 mm from end-of-optics to target
Source Gases Typically Argon, but can also use He, Ne, Kr & Xe

Bake-out Temperature 200° C maximum

 

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