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Pulse Laser Deposition
| Model | model_mm |
|---|---|
| Operating time | 01:00 ~ 24:00 |
| inquiry |
Unit content
- Process Chamber (Multi-Port, Gate Value)
- Substrate, Target system (Rotating)
- Laser System (KrF Excimer, 248nm, 700mJ, 50Hz)
- Pumping System ( 10 9 torr)
- Gas Delivery System (MFC 3ch)
Tel. +82-62-715-4703~4 / Fax. +82-62-715-4707
Copyright(c) 2014 Center for Relativistic Laser Science at IBS. All Rights Reserved.