IBS Institute for Basic Science
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Probe station

equipment explanation
Model 4200-SCS
Operating time SUN(00:00~24:00)
MON(00:00~24:00)
TUE(00:00~24:00)
WED(00:00~24:00)
THU(00:00~24:00)
FRI(00:00~24:00)
SAT(00:00~24:00)
Location 86691
inquiry Jungsue Choi
010-3169-9391
Reservation

Notice

 

Available Time // Except 15:00 ~ 18:00 on every Mon ~ Fri.

 

Notice // If you want to have training for using this equipment, please contact Super-user.

 

Current Status // Now on operation.

Physically acquire signals from the internal nodes of a semiconductor device and utilizes manipulators which allow the precise positioning of thin needles on the surface of a semiconductor device

 

Vacuum system : R.P only ( 2x10-3)
Temp : -170℃ ~ 800℃
CCD camera available
Cooling gas : liquid He or nitrogen
gases : Argon, Nitrogen
4 - probe system

 

 

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